Cluster size effect on reactive sputtering by fluorine cluster impact using molecular dynamics simulation
نویسندگان
چکیده
منابع مشابه
Molecular Dynamics Simulation of Al Energetic Nano Cluster Impact (ECI) onto the Surface
On the atomic scale, Molecular Dynamic (MD) Simulation of Nano Al cluster impact on Al (100) substrate surface has been carried out for energies of 1-20 eV/atom to understand quantitatively the interaction mechanisms between the cluster atoms and the substrate atoms. The many body Embedded Atom Method (EAM) was used in this simulation. We investigated the maximum substrate temperature Tmax and...
متن کاملMolecular Dynamics Simulation of Potassium Chloride Melting(.I. Microcrystal Simulation and Sample Size Effect)
The effect of sample size on the melting parameter of simulated potassium chloride microcrystal is investigated by molecular dynamics simulation. The size of microcrystal is varied from 8 to 4096 ions. The increase in melting temperature with sample size was found to be in good agreement with the theory.
متن کاملEffect of impact angle and projectile size on sputtering efficiency of solid benzene investigated by molecular dynamics simulations
0168-583X/$ see front matter 2011 Elsevier B.V. doi:10.1016/j.nimb.2010.12.026 ⇑ Corresponding author. Fax: +48 12 633 7086. E-mail address: [email protected] (B Molecular dynamics computer simulations have been used to investigate the effect of the cluster size on the sputtering yield dependence on the impact angle. Ar366 and Ar2953 cluster projectiles with 14.75 keV of incident ...
متن کاملCrater formation and sputtering by cluster impacts
A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20–50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the face...
متن کاملInvestigation of Melting by Molecular Dynamics Simulation
The melting of a 64 ion microcrystal of KCI was studied by means of a molecular dynamics computer simulation. We used a central pair interaction with an inverse power law repulsion. The thermodynamics, kinetic and structural properties such as melting temperature, latent heat, mean square displacement, diffusion constant, radial distribution function and bond angle distribution are calculated. ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2001
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00413-x